LBTEK-Ultra-precision micro-probe laser interferometer

Product Description

Picometer-level high-precision measurement
Compact and flexible probe
High stability

The picometer-level ultra-precision micro-probe laser interferometer originates from over two decades of technical accumulation by the Harbin Institute of Technology laser team. It employs core high-precision laser interferometry technology, combined with a micro-probe and flexible optical fiber transmission design, breaking through the spatial and range limitations of traditional interferometers and achieving picometer-level ultra-high resolution measurement over large travel ranges. The system offers various flexible configurations, including single-axis, linked multi-axis (typically four-axis), and independent multi-axis (typically three-axis), meeting complex requirements from basic displacement feedback to multi-dimensional synchronous monitoring. The instrument adopts a sensing-separation architecture and advanced anti-interference modules, maintaining excellent stability even in harsh environments such as vacuum. With its extremely compact design and convenient installation and adjustment experience, it is widely used in fields such as non-contact displacement feedback/geometric measurement and vibration amplitude detection. It is an indispensable high-precision measurement tool in cutting-edge equipment research, including optical manufacturing, precision machining, precision metrology, and semiconductor lithography machines.

Ultra-precision micro-probe laser interferometer

High resolution <100pm
High measurement accuracy 10 nm+3*10^-7L
Working distance 0-3m

The picometer-level ultra-precise micro-probe laser interferometer is equipped with a 1532nm high-performance frequency-stabilized laser source. It features a measurement resolution better than 100pm and a periodic nonlinear error of ≤1 nm, achieving a measurement accuracy of 10 nm + 3×10⁻⁷ L, precisely meeting the stringent demands of ultra-precision detection. The system offers flexible configurations from single-axis to up to 4-axis versions. With a high-speed response of 2m/s and a measurement range of 0-3m, it perfectly adapts to various scenarios, from basic displacement feedback to multi-degree-of-freedom precision measurement. The ultra-miniature probe design, with a minimum size of Φ3.4mm×20mm, allows the device to easily access narrow spaces for in-situ testing under complex working conditions. Coupled with a highly stable optical architecture and a reinforced body design, it ensures exceptional reliability for long-term continuous operation.

Back Interface Diagram

	Product Model	Measurement accuracy	Resolution	Laser wavelength	Number of measurement axes	Unit Price	Compare	Lead Time
	MDI-20P1 New	10 nm + 3×10⁻⁷ L (L is the measurement distance)	<100 pm	1532nm	Single Axis	$27,455.64		8 weeks	Add Cart