Single-axis Scanning Micromirrors

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Product Description
  • Visual operation, simple and convenient
  • Large scanning angle
  • Compact size, high reliability
  • Used for laser scanning, lidar and other applications
The MEMS mirror is a type of optical MEMS actuator chip capable of deflecting, modulating, opening/closing, and phase-controlling laser beams under driving forces. Based on the driving methods, MEMS mirrors can be categorized into four types: electrostatic drive (ES), electromagnetic drive (EM), electrothermal drive (ET), and piezoelectric drive (PE). The single-axis scanning micromirror provided by LBTEK is a chip based on MEMS technology. Under the influence of a driving signal, the micromirror performs resonant torsional motion around the torsion beam to achieve single-axis scanning. It features compact size, high reliability, and finds extensive applications in laser scanning, LiDAR, laser display, and other fields.
Single-axis scanning micromirror
  • Large scanning angle
  • Single-axis scanning with high linearity
  • Development board control with visual operation
  • Refer to technical specifications for real-time angle calculation
The single-axis scanning micromirror provided by LBTEK is a chip based on MEMS technology, where the MEMS-1.3-1.15K is electrostatically driven and the MEMS-12-0.2K is electromagnetically driven. Under the action of the driving signal, the micromirror performs resonant torsional motion around the torsion beam to achieve the effect of single-axis scanning. The micromirror is processed from single-crystal silicon and coated with a metal film on the mirror surface to increase reflectivity. The mirror itself is supported by torsion beams and performs resonant motion under the driving signal (it cannot stop at a certain angle, and the frequency cannot be adjusted). For product parameters and usage, users can download the manual for reference. Note: To extend the product's service life, minimize the number of insertions and removals between the development board and the flexible cable of the single-axis scanning micromirror during use to avoid damaging the data interface (once damaged, it cannot be repaired).

Install a single-axis scanning micromirror using AMP-1R

Product Model
Operating Wavelength
Mirror size
Unit Price
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Lead Time
MEMS-12-0.2K 800 nm-20 μm20 mm × 12 mm (oval)$1077.577 weeks
MEMS-1.3-1.15K 800 nm-20 μmØ1.3 mm$404.123 weeks
Single-axis scanning micromirror development board
  • Integrated development board, easy to operate
  • Micro-USB power supply interface
  • Real-time scanning status reading
The single-axis scanning micromirror development board provided by LBTEK can be used for scanning control of single-axis scanning micromirrors, featuring visual operation and precise control, with the ability to read the mirror status in real time. The development board is powered via a Micro-USB interface and does not require an external power supply. Users can select the appropriate development board based on the purchased single-axis scanning micromirror. Note: The development board is an unencapsulated PCB circuit board and should not be placed directly on the surface of an optical platform during use.
Single-axis scanning micromirror development board
Product Model
Interface Type
Applicable Products
Unit Price
Compare
Lead Time
MDDB-12-0.2K Micro-USBMEMS-12-0.2K$134.793 weeks
MDDB-1.3-1.15K Micro-USBMEMS-1.3-1.15K$134.793 weeks
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