Ultra-high Precision UV Femtosecond Laser High-speed Processing System

Specifications
Application
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Product Description
  • Ultra-high precision processing (feature size less than 100nm)
  • Cross-scale structure manufacturing
  • Wide applicability of materials
  • Machine vision
  • Automated control of system hardware, processing workflow and processing parameters
The Roban-GT series ultra-high precision UV femtosecond laser high-speed processing system is equipped with a UV femtosecond laser amplifier as the light source. This system utilizes a high-speed scanning galvanometer coupled with a 4f optical system. Through the objective lens, it conducts high-speed and high-precision processing within the scanning field of the objective lens. Simultaneously, the system utilizes a two-dimensional high-precision air-bearing linear motor stage to perform laser scanning of large-scale continuous micro-nano structures. By coupling with galvanometer scanning across its full travel range to address the limited scanning scope, it simultaneously meets the dual requirements of high speed and large-scale in laser ultra-precision processing.​​ This system is applicable to cross-scale structural manufacturing, featuring a range exceeding the centimeter level and nanometer-level precision. For specific customization details of this system, please contact LBTEK Technical Support.
Attribute
light sourceFemtosecond laser amplifier (343 nm, 1-200 kHz), optional configuration available
Processing MaterialsTransparent dielectric materials, semiconductor materials, metals, polymers, etc.
Processing range (L×W×H)100×100×60 mm
Device dimensions (L×W×H)800×600×600 mm
XY-axis repeat positioning accuracy±50 nm
Z-axis repeat positioning accuracy±100 nm
Maximum scanning speed200 mm/s
Processing file formatSupports conversion of CAD file formats such as bitmaps, DXF, and STL.
Electrical RequirementsAC200-240 V,50/60 Hz,5 kW
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