light sourceFemtosecond laser amplifier (343 nm, 1-200 kHz), optional configuration available
Processing MaterialsTransparent dielectric materials, semiconductor materials, metals, polymers, etc.
Processing range (L×W×H)100×100×60 mm
Device dimensions (L×W×H)800×600×600 mm
XY-axis repeat positioning accuracy±50 nm
Z-axis repeat positioning accuracy±100 nm
Maximum scanning speed200 mm/s
Processing file formatSupports conversion of CAD file formats such as bitmaps, DXF, and STL.
Electrical RequirementsAC200-240 V,50/60 Hz,5 kW