light sourceFemtosecond Laser Amplifier (1030 nm / 515 nm, 1-200kHz)
Processing MaterialsQuartz fiber, sapphire fiber, etc.
Processing range (L×W×H)100×100×60 mm
Device dimensions (L×W×H)600×500×800 mm
XY-axis repeat positioning accuracy±50 nm
Z-axis repeat positioning accuracy±100 nm
Maximum scanning speed100 mm/s
Processing file formatAeroBasic, supports STL format conversion