light sourceFemtosecond laser amplifier stage (1030nm/515nm/343nm) optional
Processing MaterialsSemiconductor materials, transparent dielectric materials, metals, optical fibers, polymers, etc.
Processing range (L×W)25×25 mm to 500×500 mm (as per requirement)
Device dimensions (L×W×H)800×600×800 mm
XY-axis repeat positioning accuracy±50 nm to ±5 μm
Z-axis repeat positioning accuracy±100 nm to ±5 μm
Scaning speed0.1-200mm/s (as per requirement)
Processing file formatAeroBasic, supports DXF and STL file conversion
Electrical RequirementsAC200~240 V,50/60 Hz,5 kW