Maximum printable height≤10 mm
Minimum surface roughness≤30 nm
Minimum feature line width≤50 nm (XY plane) and ≤300 nm (Z-axis)
Minimum cycle (XY plane)≤400 nm
Scanning speed (maximum)10 m/s divided by the objective magnification (e.g.: scanning speed is 100 mm/s under 100X objective)
Assembly accuracy≤100 nm (XY plane)
Laser center wavelength517 nm
Laser average power>1 W
Laser pulse width<200 fs
Laser power stability<1% RMS
Laser beam qualityM²<1.2
Laser repetition rate80±5 MHz
External Dimensions (W × H × D)1700 mm×1500 mm×2200 mm
Instrument weight<2000 kg
Installation RequirementsClass 1000 or higher cleanroom
Electrical Conditions220/380 V Power >5 kW
Environment stability20±1 ℃
Compressed airFilter to 0.25 μm, oil-free, stabilized at 0.5-0.6 MPa, flow rate should be 500-800 SLPM
Ambient LightingYellow light